The Client
In 2005, STMicroelectronics Pte Ltd awarded Veolia Water Solutions & Technologies (Veolia) the project to build the ultra-pure water (UPW) purification treatment plant - AMK6E (loop 5) in Singapore with a production capacity of 160m³/hr. STMicroelectronics is a global leader in developing and delivering System-on-Chip (SoC) and semiconductor solutions across the spectrum of microelectronics.
As one of the world’s top ten semiconductor suppliers since 1999, STMicroelectronics has leading-edge manufacturing facilities on four continents, including a 200mm wafer fab in Singapore, where proper microelectronics water treatment is essential to maintain production quality.
The Client’s Needs
To meet the growing demand of the semiconductor industry, STMicroelectronics Pte Ltd was seeking a reliable Ultra Pure Water (UPW) partner capable of delivering purified water treatment projects on a very fast track (4 months from award to water certification).
The company required a system that could consistently provide high-quality water purification while meeting the strict technical specifications necessary for a 200mm wafer fab. The solution had to ensure long-term reliability and compliance with industry standards for microelectronics water treatment.
Veolia's Solution - Microelectronic Water Purification
To reach the TOC and Resistivity criteria, the raw water is treated in the Primary Make-Up system using advanced water-purification technologies such as UV, Membrane Degasifier, and Continuous De-ionization (CEDI) – tailored for semiconductor water treatments.
The Continuous De-ionization (CEDI) process ensures consistent purified water treatment with a high percentage of feed water ion removal. CEDI systems operate without chemicals, 24 hours a day, 7 days a week, eliminating regeneration downtime.
Ultrafiltration membranes are used in the polishing loop to guarantee continuous high-quality water at the point of use.
Thanks to intelligent engineering design, Veolia successfully incorporated these new water purification systems into the existing plant without requiring shutdown.
Ensure Reliable Ultra-Pure Water for Your Facility
Partner with Veolia for efficient microelectronics water treatment systems that reduce waste and optimize resources.
Results
- By combining advanced technologies, Veolia offered cost-effective solution and ensured high purified water production (TOC<1ppb, Resistivity to 18.2 mega ohm, Boron<5ppt, Silica<0.5ppb, particle 0.05M<300c/l).
- Constant high purity water is provided to STMicroelectronics Pte Ltd at the point of use to ensure the quality of the semi-conductors production process.
- By using SCADA PLC, the plant is controlled at the touch of a button 24/7.